AN APPARATUS FOR COMBINED VAPOR-DEPOSITION AND ION-IMPLANTATION TO MODIFY THE SURFACE-PROPERTIES OF METALS

被引：14

作者：

MARGESIN, B

GIACOMOZZI, F

GUZMAN, L

LAZZARI, G

ZANINI, V

机构：

来源：

关键词：

D O I：

10.1016/0168-583X(87)90905-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：566 / 569

页数：4

共 8 条

[1] Behrisch R., 1981, SPUTTERING PARTICLE, V1
[2] CALLIARI L, 1985, IN PRESS P NATO ASI
[3] ION-IMPLANTATION AND ION ASSISTED COATING OF METALS
DEARNALEY, G
GOODE, PD
MINTER, FJ
PEACOCK, AT
WADDELL, CN
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06): : 2684 - 2689
[4] THIN SOLID FILMS TO COMBAT FRICTION, WEAR, AND CORROSION
HINTERMANN, HE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (04): : 816 - 822
[5] MODIFICATION OF EVAPORATED CHROMIUM BY CONCURRENT ION-BOMBARDMENT
HOFFMAN, DW
GAERTTNER, MR
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01): : 425 - 428
[6] A VERSATILE TARGET CHAMBER IN AN ION IMPLANTER FOR METALLURGICAL RESEARCH
LAZZARI, G
MARGESIN, B
SCOTONI, I
ZANINI, V
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2) : 210 - 213
[7] WEISSMANTEL C, 1986, VIDE, V41, P45
[8] WEISSMANTEL C, 1977, 3RD P INT C SOL SURF, P1533