SEMICONDUCTOR CAPACITANCE-TYPE ACCELEROMETER WITH PWM ELECTROSTATIC SERVO TECHNIQUE

被引：23

作者：

SUZUKI, S

TUCHITANI, S

SATO, K

UENO, S

YOKOTA, Y

SATO, M

ESASHI, M

机构：

[1] HITACHI LTD,SAWA WORKS,KATSUTA,IBARAKI 312,JAPAN

[2] HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO 185,JAPAN

[3] TOHOKU UNIV,FAC ENGN,SENDAI,MIYAGI 980,JAPAN

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 21卷 / 1-3期

关键词：

Close Loop Systems - Electrostatic Servo Techniques;

D O I：

10.1016/0924-4247(90)85063-A

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new semiconductor capacitance-type accelerometer utilizing a pulse width modulation (PWM) electrostatic servo technique has been developed. Highly accurate detection of feeble and low frequency acceleration became possible with the PWM sensing method. The limited air gaps between the movable and fixed electrodes ensured compatibility between high sensitivity and durability, while transverse sensitivity was reduced due to the symmetric structure of the sensing part. © 1990.

引用

页码：316 / 319

页数：4

共 8 条

[1]

BARTH PW, 1988, JUN IEEE SOL STAT SE, P35

[2]

NAKAMURA M, 1987, 4TH INT C SOL STAT S, P112

[3]

RUDOLF F, 1987, 4TH INT C SOL STAT S, P395

[4]

SANDMAIER H, 1987, 4TH INT C SOL STAT S, P399

[5]

SUMINTO JT, 1987, 4TH P INT C SOL STAT, P336

[6]

TERRY S, 1988, JUN IEEE SOL STAT SE, P114

[7]

TSUGAI M, 1987, 4TH INT C SOL STAT S, P403

[8] A HIGH-PERFORMANCE, VARIABLE CAPACITANCE ACCELEROMETER [J].

WILNER, LB .

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1988, 37 (04) :569-571

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