CONTAMINATION LAYERS FORMED BY ARGON ION-BOMBARDMENT

被引：17

作者：

SHIMIZU, K ^{[1
]}

KAWAKATSU, H ^{[1
]}

KANAYA, K ^{[1
]}

机构：

[1] KOGAKUIN UNIV,SHINJUKU,TOKYO,JAPAN

来源：

关键词：

D O I：

10.1088/0022-3727/8/13/006

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1453 / 1459

页数：7

共 19 条

[1] FORMATION OF THIN POLYMER FILMS BY ELECTRON BOMBARDMENT
CHRISTY, RW
[J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (09) : 1680 - 1683
[2] PARTICLE GROWTH IN THE ELECTRON MICROSCOPE
COSSLETT, VE
[J]. JOURNAL OF APPLIED PHYSICS, 1947, 18 (09) : 844 - 845
[3] THE ORIGIN OF SPECIMEN CONTAMINATION IN THE ELECTRON MICROSCOPE
ENNOS, AE
[J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1953, 4 (APR): : 101 - 106
[4] HASHIMOTO H, 1968, 4TH P EUR REG C EL M, V1, P39
[5] ON THE INVESTIGATION OF SPECIMEN CONTAMINATION IN THE ELECTRON MICROSCOPE
HILLIER, J
[J]. JOURNAL OF APPLIED PHYSICS, 1948, 19 (03) : 226 - 230
[6] Holland L., 1969, British Journal of Applied Physics (Journal of Physics D), V2
[7] CONSISTENT THEORY OF SPUTTERING OF SOLID TARGETS BY ION-BOMBARDMENT USING POWER POTENTIAL LAW
KANAYA, K
HOJOU, K
KOGA, K
TOKI, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1973, 12 (09) : 1297 - 1306
[8] Kanaya K., 1964, OPTIK, V21, P399
[9] KANAYA K, 1967, B ELECTROTECH LAB, V31, P316
[10] Kanaya K., 1965, P ELECTRON LASER BEA, P489