SIMULATION EXPERIMENT ON CHEMICAL SPUTTERING OF CARBIDES FOR THE ECR AND GLOW-DISCHARGE CLEANING

被引：5

作者：

SAKAMOTO, Y

OYAMA, H

KAKINUMA, S

机构：

来源：

JOURNAL OF NUCLEAR MATERIALS | 1984年 / 128卷 / DEC期

关键词：

D O I：

10.1016/0022-3115(84)90472-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：867 / 871

页数：5

共 16 条

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