DOUBLE ZINC DIFFUSION FRONTS IN INP - THEORY AND EXPERIMENT

被引:64
作者
YAMADA, M
TIEN, PK
MARTIN, RJ
NAHORY, RE
BALLMAN, AA
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D O I
10.1063/1.94436
中图分类号
O59 [应用物理学];
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页码:594 / 596
页数:3
相关论文
共 8 条
[1]   LOW-TEMPERATURE ZN-DIFFUSION AND CD-DIFFUSION PROFILES IN INP AND FORMATION OF GUARD RING IN INP AVALANCHE PHOTO-DIODES [J].
ANDO, H ;
SUSA, N ;
KANBE, H .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (09) :1408-1413
[2]   DIFFUSION AND SOLUBILITY OF ZINC IN INDIUM PHOSPHIDE [J].
CHANG, LL ;
CASEY, HC .
SOLID-STATE ELECTRONICS, 1964, 7 (06) :481-&
[3]   FORMATION OF P+-P--N- JUNCTIONS IN INP BY CD DIFFUSION [J].
CHIN, AK ;
DUTT, BV ;
TEMKIN, H ;
BONNER, WA ;
ROCCASECCA, DD .
APPLIED PHYSICS LETTERS, 1980, 36 (11) :924-926
[4]  
Crank J, 1975, WSEAS T SYST CONTROL
[5]   ELECTRICAL-PROPERTIES OF ZINC DIFFUSED INDIUM-PHOSPHIDE [J].
HOOPER, A ;
TUCK, B .
SOLID-STATE ELECTRONICS, 1976, 19 (06) :513-517
[6]  
MILLER BI, 1979, 21ST EMC
[7]  
TIEN PK, 1979, APPL PHYS LETT, V34, P701, DOI 10.1063/1.90611
[8]   DIFFUSION PROFILES OF ZINC IN INDIUM-PHOSPHIDE [J].
TUCK, B ;
HOOPER, A .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1975, 8 (15) :1806-1821