共 32 条
[4]
TEMPERATURE-MEASUREMENTS OF GLASS SUBSTRATES DURING PLASMA-ETCHING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1981, 18 (02)
:335-338
[8]
THERMAL-DIFFUSIVITY MEASUREMENTS OF THIN-FILMS WITH A PYROELECTRIC CALORIMETER
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
1985, 38 (03)
:213-219
[9]
PYROELECTRIC CALORIMETER FOR PHOTOTHERMAL STUDIES OF THIN-FILMS AND ADSORBATES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1987, 5 (05)
:2875-2889
[10]
GUIDOTTI D, 1985, APPL PHYS LETT, V47, P1337