TEMPERATURE-MEASUREMENTS OF GLASS SUBSTRATES DURING PLASMA-ETCHING

被引：47

作者：

BOND, RA

DZIOBA, S

NAGUIB, HM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 02期

关键词：

D O I：

10.1116/1.570753

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：335 / 338

页数：4

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