IMPORTANCE OF ATTACHMENT CROSS-SECTIONS OF F-FORMATION FOR THE EFFECTIVE IONIZATION COEFFICIENTS IN SF6

被引：26

作者：

HAYASHI, M

NIMURA, T

机构：

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1984年 / 17卷 / 11期

关键词：

D O I：

10.1088/0022-3727/17/11/008

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2215 / 2223

页数：9

共 37 条

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