ELECTRONIC EXCITATION MECHANISM OF SPUTTERING AND TRACK FORMATION BY ENERGETIC IONS IN THE ELECTRONIC STOPPING REGIME

被引:32
作者
ITOH, N
NAKAYAMA, T
机构
关键词
D O I
10.1016/0168-583X(86)90564-1
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:550 / 555
页数:6
相关论文
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