MECHANICAL-BEHAVIOR OF ALUMINUM AND AL-CU(2-PERCENT) THIN-FILMS

被引：13

作者：

BROTZEN, FR ^{[1
]}

ROSENMAYER, CT ^{[1
]}

GALE, RJ ^{[1
]}

机构：

[1] TEXAS INSTRUMENTS INC,DALLAS,TX 75265

来源：

THIN SOLID FILMS | 1988年 / 166卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(88)90390-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：291 / 298

页数：8

共 17 条

[1]

BADACHHAPE RB, 1986, THIN SOLID FILMS, V75, pL39

[2]

Beams W., 1959, P INT C STRUCTURE PR, P183

[3]

Campbell D. S., 1970, HDB THIN FILM TECHNO, P12

[4]

COLLIN A, 1960, J APPL PHYS, V31, P2135

[5]

DANTONIO C, 1963, T METALL SOC AIME, V227, P1346

[6] Plastic properties of thin films on substrates as measured by submicron indentation hardness and substrate curvature techniques [J].

Doerner, M. F. ;

Gardner, D. S. ;

Nix, W. D. .

JOURNAL OF MATERIALS RESEARCH, 1986, 1 (06) :845-851

[7] HALL-PETCH RELATION IN THIN-FILM METALLIZATIONS [J].

GRIFFIN, AJ ;

BROTZEN, FR ;

DUNN, C .

SCRIPTA METALLURGICA, 1986, 20 (09) :1271-1272

[8] MECHANICAL-PROPERTIES AND MICROSTRUCTURES OF AL-1-PERCENT-SI THIN-FILM METALLIZATIONS [J].

GRIFFIN, AJ ;

BROTZEN, FR ;

DUNN, CF .

THIN SOLID FILMS, 1987, 150 (2-3) :237-244

[9]

Hoffman R. W., 1966, PHYS THIN FILMS, VVol. 3, pp. 211

[10] RECENT DEVELOPMENTS IN STUDY OF MECHANICAL PROPERTIES OF THIN-FILMS [J].

KINOSITA, K .

THIN SOLID FILMS, 1972, 12 (01) :17-&

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