RF-SPUTTERED ALUMINUM NITRIDE FILMS ON SAPPHIRE

被引：103

作者：

SHUSKUS, AJ ^{[1
]}

REEDER, TM ^{[1
]}

PARADIS, EL ^{[1
]}

机构：

[1] UNITED AIRCRAFT CORP,RES LABS,E HARTFORD,CT 06108

来源：

关键词：

D O I：

10.1063/1.1655132

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：155 / 156

页数：2

共 11 条

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[9] AIN SWITCHABLE MEMORY RESISTOR CAPABLE OF A 20-MHZ CYCLING RATE AND 500-PICO-SECOND SWITCHING TIME
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[J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1973, 17 (01) : 61 - 65
[10] SMITH WR, 1969, IEEE T MICROWAVE THE, VMT17, P856