ON THE ADHESION OF NITRIDE COATINGS ON HSS SUBSTRATES

被引：4

作者：

KOPACZ, U

JEHN, HA

机构：

[1] Max-Planck-Inst fuer, Werkstoffwissenschaften, Stuttgart,, West Ger, Max-Planck-Inst fuer Werkstoffwissenschaften, Stuttgart, West Ger

来源：

VACUUM | 1986年 / 36卷 / 1-3期

关键词：

NITRIDES - Thin Films - PROTECTIVE COATINGS - Adhesion - SUBSTRATES - WEAR OF MATERIALS;

D O I：

10.1016/0042-207X(86)90275-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The adhesion of reactively rf magnetron-sputtered nitride coatings (TiN, HfN, NbN) on HSS substrates was studied as a function of substrate temperature (775-300 K) and sputtering atmosphere (various total pressures and different N//2/Ar ratios). The adhesion was tested by means of the scratch test and correlated to the film morphology. The critical load, as measured by the scratch test, is influenced by the properties of the substrate, the deposition conditions, the properties of the coating and the testing method. These dependencies are discussed in detail.

引用

页码：81 / 84

页数：4

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