GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR MICROVOLUME ELEMENTAL ANALYSIS

被引：41

作者：

GREENE, JE

SEQUEDAOSORIO, F

NATARAJAN, BR

机构：

[1] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

[2] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801

来源：

JOURNAL OF APPLIED PHYSICS | 1975年 / 46卷 / 06期

关键词：

D O I：

10.1063/1.321906

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2701 / 2709

页数：9

共 23 条

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[2]

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[3]

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[4]

COBURN JW, 1972, RES DEV, V23, P37

[5] GLOW-DISCHARGE OPTICAL SPECTROSCOPY AS AN ANALYTICAL DEPTH PROFILING TECHNIQUE [J].

GREENE, JE ;

SEQUEDAOSORIO, F ;

NATARAJAN, BR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :366-369

[6] GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR MONITORING SPUTTER DEPOSITED FILM THICKNESS [J].

GREENE, JE ;

SEQUEDAO.F .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06) :1144-1149

[7] GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR ANALYSIS OF THIN-FILMS [J].

GREENE, JE ;

WHELAN, JM .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (06) :2509-2513

[8] MEASUREMENT OF BORON IMPURITY PROFILES IN SI USING GLOW-DISCHARGE OPTICAL SPECTROSCOPY [J].

GREENE, JE ;

SEQUEDAO.F ;

STREETMAN, BG ;

NOONAN, JR ;

KIRKPATRICK, CG .

APPLIED PHYSICS LETTERS, 1974, 25 (08) :435-440

[9]

GREENE JE, 1970, B AM PHYS SOC, V15, P1614

[10]

KAMINSKY M, 1965, ATOMIC IONIC IMPACT, P147

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