PREPARATION OF HIGH-PURITY A-SI-H FILMS AND THEIR LIGHT SOAKING EFFECTS

被引：3

作者：

MURAMATSU, S

NAKAMURA, N

MATSUBARA, S

ITOH, H

SHIMADA, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1985年 / 24卷 / 09期

关键词：

D O I：

10.1143/JJAP.24.L744

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L744 / L746

页数：3

共 6 条

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CARLSON, DE
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[2] NAKAMURA N, 1984, AIP C P, V120, P303
[3] SHIMADA T, 1984, 1 INT PHOT SCI ENG C, P445
[4] REVERSIBLE CONDUCTIVITY CHANGES IN DISCHARGE-PRODUCED AMORPHOUS SI
STAEBLER, DL
WRONSKI, CR
[J]. APPLIED PHYSICS LETTERS, 1977, 31 (04) : 292 - 294
[5] CLEAN A-SI-H PREPARED IN A UHV SYSTEM
TSAI, CC
KNIGHTS, JC
THOMPSON, MJ
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 66 (1-2) : 45 - 50
[6] TSAI CC, 1984, AIP CONF PR, V120, P242