INVESTIGATION OF THE HYDROGEN AND IMPURITY CONTENTS OF AMORPHOUS-SILICON BY SECONDARY ION MASS-SPECTROMETRY

被引：19

作者：

MAGEE, C

CARLSON, DE

机构：

来源：

SOLAR CELLS | 1980年 / 2卷 / 04期

关键词：

D O I：

10.1016/0379-6787(80)90012-5

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

收藏

页码：365 / 376

页数：12

相关论文

共 14 条

[1] QUANTITATIVE-ANALYSIS OF HYDROGEN IN GLOW-DISCHARGE AMORPHOUS SILICON
BRODSKY, MH
FRISCH, MA
ZIEGLER, JF
LANFORD, WA
[J]. APPLIED PHYSICS LETTERS, 1977, 30 (11) : 561 - 563
[2] EFFECT OF HYDROGEN CONTENT ON THE PHOTO-VOLTAIC PROPERTIES OF AMORPHOUS SILICON
CARLSON, DE
MAGEE, CW
TRIANO, AR
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (04) : 688 - 691
[3] HYDROGENATED AMORPHOUS-SILICON FILMS IN PALLADIUM SCHOTTKY-BARRIER CELLS
CARLSON, DE
MAGEE, CW
THOMAS, JH
[J]. SOLAR CELLS, 1980, 1 (04): : 371 - 379
[4] SIMS ANALYSIS OF DEUTERIUM DIFFUSION IN HYDROGENATED AMORPHOUS SILICON
CARLSON, DE
MAGEE, CW
[J]. APPLIED PHYSICS LETTERS, 1978, 33 (01) : 81 - 83
[5] HYDROGEN-ION IMPLANTATION PROFILES AS DETERMINED BY SIMS
MAGEE, CW
WU, CP
[J]. NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3): : 529 - 533
[6] SECONDARY ION QUADRUPOLE MASS-SPECTROMETER FOR DEPTH PROFILING-DESIGN AND PERFORMANCE EVALUATION
MAGEE, CW
HARRINGTON, WL
HONIG, RE
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (04) : 477 - 485
[7] DEPTH PROFILING OF N-TYPE DOPANTS IN SI AND GAAS USING CS+ BOMBARDMENT NEGATIVE SECONDARY ION MASS-SPECTROMETRY IN ULTRAHIGH-VACUUM
MAGEE, CW
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (04) : 660 - 663
[8] MAGEE CW, 1979, ANAL HYDROGEN SOLIDS, P43
[9] MAGEE CW, 1978, P TOPICAL C CHARACTE, P151
[10] PHOTOLUMINESCENCE OF HYDROGENATED AMORPHOUS SILICON
PANKOVE, JI
CARLSON, DE
[J]. APPLIED PHYSICS LETTERS, 1977, 31 (07) : 450 - 451