HYDROGEN-ION IMPLANTATION PROFILES AS DETERMINED BY SIMS

被引：36

作者：

MAGEE, CW

WU, CP

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1978年 / 149卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(78)90921-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：529 / 533

页数：5

共 9 条

[1] NONLINEAR EFFECTS IN HEAVY-ION SPUTTERING
ANDERSEN, HH
BAY, HL
[J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (02) : 953 - 954
[2] Andersen HH., 1977, HYDROGEN STOPPING PO
[3] ION IMPLANTATION DEPTH DISTRIBUTIONS - ENERGY DEPOSITION INTO ATOMIC PROCESSES AND ION LOCATIONS
BRICE, DK
[J]. APPLIED PHYSICS LETTERS, 1970, 16 (03) : 103 - &
[4] INTERACTION OF ION-BEAMS WITH SOLIDS
DAVIES, JA
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 438 - 438
[5] MAGEE CW, REV SCI INSTR
[6] NORTHCLIFFE LC, 1970, NUCL DATA TABLES A, V1
[7] SIGMUND P, 1974, APPL PHYS LETT, V25, P199
[8] INELASTIC STOPPING OF MEDIUM ENERGY LIGHT-IONS IN SILICON
THOMPSON, DA
ROBINSON, JE
WALKER, RS
[J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 32 (3-4): : 169 - 175
[9] PROFILING HYDROGEN IN MATERIALS USING ION-BEAMS
ZIEGLER, JF
WU, CP
WILLIAMS, P
WHITE, CW
TERREAULT, B
SCHERZER, BMU
SCHULTE, RL
SCHNEID, EJ
MAGEE, CW
LIGEON, E
LECUYER, J
LANFORD, WA
KUEHNE, FJ
KAMYKOWSKI, EA
HOFER, WO
GUIVARCH, A
FILLEUX, CH
DELINE, VR
EVANS, CA
COHEN, BL
CLARK, GJ
CHU, WK
BRASSARD, C
BLEWER, RS
BEHRISCH, R
APPLETON, BR
ALLRED, DD
[J]. NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3): : 19 - 39