MATERIAL PROPERTIES OF HIGH-QUALITY GAAS EPITAXIAL LAYERS GROWN ON SI SUBSTRATES

被引:199
作者
FISCHER, R
MORKOC, H
NEUMANN, DA
ZABEL, H
CHOI, C
OTSUKA, N
LONGERBONE, M
ERICKSON, LP
机构
[1] UNIV ILLINOIS,DEPT PHYS,URBANA,IL 61801
[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
[3] PURDUE UNIV,DEPT MAT SCI,W LAFAYETTE,IN 47907
[4] PERKIN ELMER,EDEN PRAIRIE,MN 55344
关键词
D O I
10.1063/1.337253
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1640 / 1647
页数:8
相关论文
共 16 条
[1]   CHARACTERISTICS OF GAAS/AIGAAS MODFETS GROWN DIRECTLY ON (100) SILICON [J].
FISCHER, R ;
HENDERSON, T ;
KLEM, J ;
MASSELINK, WT ;
KOPP, W ;
MORKOC, H ;
LITTON, CW .
ELECTRONICS LETTERS, 1984, 20 (22) :945-947
[2]   LOW THRESHOLD LASER OPERATION AT ROOM-TEMPERATURE IN GAAS/(AL,GA)AS STRUCTURES GROWN DIRECTLY ON (100)SI [J].
FISCHER, R ;
KOPP, W ;
MORKOC, H ;
PION, M ;
SPECHT, A ;
BURKHART, G ;
APPELMAN, H ;
MCGOUGAN, D ;
RICE, R .
APPLIED PHYSICS LETTERS, 1986, 48 (20) :1360-1361
[3]   GROWTH AND PROPERTIES OF GAAS/ALGAAS ON NONPOLAR SUBSTRATES USING MOLECULAR-BEAM EPITAXY [J].
FISCHER, R ;
MASSELINK, WT ;
KLEM, J ;
HENDERSON, T ;
MCGLINN, TC ;
KLEIN, MV ;
MORKOC, H ;
MAZUR, JH ;
WASHBURN, J .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (01) :374-381
[4]  
Fischer R., 1985, International Electron Devices Meeting. Technical Digest (Cat. No. 85CH2252-5), P332
[5]   GAAS BIPOLAR-TRANSISTORS GROWN ON (100) SI SUBSTRATES BY MOLECULAR-BEAM EPITAXY [J].
FISCHER, R ;
CHAND, N ;
KOPP, W ;
MORKOC, H ;
ERICKSON, LP ;
YOUNGMAN, R .
APPLIED PHYSICS LETTERS, 1985, 47 (04) :397-399
[6]   A DC AND MICROWAVE COMPARISON OF GAAS-MESFETS ON GAAS AND SI SUBSTRATES [J].
FISCHER, RJ ;
CHAND, N ;
KOPP, WF ;
PENG, CK ;
MORKOC, H ;
GLEASON, KR ;
SCHEITLIN, D .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1986, 33 (02) :206-213
[7]   LEED STUDY OF THE STEPPED SURFACE OF VICINAL SI(100) [J].
KAPLAN, R .
SURFACE SCIENCE, 1980, 93 (01) :145-158
[8]   DEFECTS IN EPITAXIAL MULTILAYERS .2. DISLOCATION PILE-UPS, THREADING DISLOCATIONS, SLIP LINES AND CRACKS [J].
MATTHEWS, JW ;
BLAKESLEE, AE .
JOURNAL OF CRYSTAL GROWTH, 1975, 29 (03) :273-280
[9]   METAL-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS FABRICATED IN GAAS-LAYERS GROWN DIRECTLY ON SI SUBSTRATES BY MOLECULAR-BEAM EPITAXY [J].
METZE, GM ;
CHOI, HK ;
TSAUR, BY .
APPLIED PHYSICS LETTERS, 1984, 45 (10) :1107-1109
[10]   STRUCTURAL-PROPERTIES OF GAAS ON SI AND GE SUBSTRATES [J].
NEUMANN, DA ;
ZHU, XM ;
ZABEL, H ;
HENDERSON, T ;
FISCHER, R ;
MASSELINK, WT ;
KLEM, J ;
PENG, CK ;
MORKOC, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (02) :642-644