THE ROLE OF AR+, CH-4+, O-2+ AND BACKSCATTERED PB+ IONS DURING NB-OXIDE-PBAUIN EDGE JUNCTION FABRICATION

被引：5

作者：

BROSIOUS, PR

机构：

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1985年 / 21卷 / 02期

关键词：

D O I：

10.1109/TMAG.1985.1063825

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：118 / 121

页数：4

共 11 条

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[5]

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[7]

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