FORCE SENSING MICROCANTILEVER USING SPUTTERED ZINC-OXIDE THIN-FILM

被引：47

作者：

ITOH, T

SUGA, T

机构：

[1] Research Center for Advanced Science and Technology (RCAST), University of Tokyo, Tokyo 153, Komaba 4-6-1, Meguro-ku

来源：

APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 01期

关键词：

D O I：

10.1063/1.110913

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A force sensing microcantilever has been developed with sputtered ZnO thin film sandwiched electrodes. Typical cantilever dimensions are 150 mum long X 50 mum wide X 3.5 mum thick. The ZnO film with thickness of 1.0 mum has high resistivity (>2.0 X 10(7) OMEGA m) and good piezoelectricity. By detecting the change of the resistance between the electrodes, the static deflection of the cantilever end can be sensed. The ac deflection of the cantilever can be measured with high sensitivity by using the piezoelectric effect. The cantilever in question is useful for scanning force microscopy both in static contact mode and in dynamic mode.

引用

页码：37 / 39

页数：3

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