共 7 条
- [1] [Anonymous], 1963, KGL DANSKE VIDENSKAB
- [2] A 100-KV ION PROBE MICROFABRICATION SYSTEM WITH A TETRODE GUN [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1145 - 1148
- [3] CLEAVER JRA, 1983, SPIE J, V393, P129
- [4] CLEAVER JRA, 1983, MICROCIRCUIT ENG 83, P135
- [5] LIQUID-METAL SOURCE OF GOLD IONS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1981, 52 (04) : 562 - 566
- [6] HIGH-RESOLUTION, ION-BEAM PROCESSES FOR MICROSTRUCTURE FABRICATION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1610 - 1612
- [7] WAGNER A, 1983, SPIE J, V393, P167