ATOMIC MIXING DURING MULTIPLE SPECIES IMPLANTATION OF SI

被引：3

作者：

CARTER, G

ARMOUR, DG

KOSTIC, S

JIMENEZRODRIGUEZ, JJ

KARPUZOV, DS

NOBES, MJ

机构：

来源：

关键词：

D O I：

10.1016/S0168-583X(87)80152-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：758 / 761

页数：4

共 5 条

[1]

JIMENEZRODRIGUE.JJ, 1986, IN PRESS

[2] RANGE DISTRIBUTIONS IN BINARY TARGETS [J].

JIMENEZRODRIGUEZ, JJ ;

KARPUZOV, DS ;

ELLIMAN, RG ;

NOBES, MJ ;

KOSTIC, S ;

ARMOUR, DG .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :43-47

[3] RANGE DISTRIBUTIONS IN MULTIPLY IMPLANTED TARGETS [J].

KOSTIC, S ;

JIMENEZRODRIGUEZ, JJ ;

KARPUZOV, DS ;

ARMOUR, DG ;

CARTER, G .

[4] GOLD AND ALUMINUM IMPLANTED STANDARD FOR ION-BEAM EXPERIMENTS [J].

MITCHELL, IV ;

ESCHBACH, HL ;

BARFOOT, KM .

NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3) :169-174

[5]

MITCHELL IV, 1978, NUCL INSTRUM METHODS, V149, P728