CHARACTERIZATION OF FLUORINE-DOPED TIN OXIDE PRODUCED BY THE PYROSOL METHOD

We present results on the electrical and optical properties of tin oxide films deposited by the pyrolysis of an aerosol which was produced by the ultrasonic vibration of an SnCl4 solution. NH4F was added to the solution in order to dope the films with fluorine. The deposition temperature for different fluorine concentrations was varied between 300 and 450-degrees-C. Films with a resistivity of 5 x 10(-4) OMEGA-cm were obtained with a 10% (by weight) concentration of F:Sn in the solution. An increase in the fluorine concentration above this value led to a degradation of the electronic properties of the film. The final concentrations of fluorine in the films were measured by secondary ion mass spectrometry.