HIGH-FREQUENCY SURFACE-ACOUSTIC-WAVE FILTER USING ZNO/DIAMOND/SI STRUCTURE

被引：70

作者：

NAKAHATA, H ^{[1
]}

HIGAKI, K ^{[1
]}

HACHIGO, A ^{[1
]}

SHIKATA, S ^{[1
]}

FUJIMORI, N ^{[1
]}

TAKAHASHI, Y ^{[1
]}

KAJIHARA, T ^{[1
]}

YAMAMOTO, Y ^{[1
]}

机构：

[1] NEC CORP LTD,DIV TRANSMISS 2,NAKAHARA KU,KAWASAKI,KANAGAWA 211,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 1A期

关键词：

DIAMOND; ZNO; SAW; FILTER; PHASE VELOCITY; GROUP VELOCITY; ELECTROMECHANICAL COUPLING COEFFICIENT; TCF; HIGH FREQUENCY;

D O I：

10.1143/JJAP.33.324

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Diamond films grown by chemical vapor deposition (CVD) method is receiving much attention as surface acoustic wave (SAW) substrate material, due to its remarkable characteristics of large SAW velocity to offer much attraction in fabrication of high frequency SAW devices. The basic properties of SAW propagating in a ZnO/diamond/Si structure were studied utilizing thin film poly-crystalline diamond. Phase velocity, group velocity, electro-mechanical coupling coefficient (K-2), and temperature coefficient of frequency (TCF) were examined by experiments and theoretical calculations. And it was confirmed that this structure provides high phase velocity up to 10000 m/s, high K-2 up to 4.8 degrees and practical TCF value of -28 ppm/degrees C. An 1.3 GHz SAW filter of a ZnO/diamond/Si structure was fabricated for the first time.

引用

页码：324 / 328

页数：5

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