HIGH-COUPLING AND HIGH-VELOCITY SAW USING ZN0 AND A1N FILMS ON A GLASS SUBSTRATE

被引：22

作者：

SHIOSAKI, T

MIKAMURA, Y

TAKEDA, F

KAWABATA, A

机构：

[1] SUMITOMO ELECT CO LTD,OSAKA,JAPAN

[2] TOYAMA NATL COLL TECHNOL,DEPT ELECT ENGN,TOYAMA,JAPAN

来源：

关键词：

D O I：

10.1109/T-UFFC.1986.26836

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

引用

页码：324 / 330

页数：7

共 20 条

[1] Bowers J. E., 1980, 1980 Ultrasonics Symposium Proceedings, P118, DOI 10.1109/ULTSYM.1980.197371
[2] BROAD-BAND EFFICIENT THIN-FILM SEZAWA WAVE INTERDIGITAL TRANSDUCERS
BOWERS, JE
KHURIYAKUB, BT
KINO, GS
[J]. APPLIED PHYSICS LETTERS, 1980, 36 (10) : 806 - 807
[3] WIDEBAND SAW CONVOLVER UTILIZING SEZAWA WAVES IN METAL-ZNO-SIO2-SI CONFIGURATION
ELLIOTT, JK
GUNSHOR, RL
PIERRET, RF
DAY, AR
[J]. APPLIED PHYSICS LETTERS, 1978, 32 (09) : 515 - 516
[4] Farnell G.W., 1972, PHYS ACOUSTICS, V9, P35, DOI DOI 10.1016/B978-0-12-395670-5.50007-6
[5] THEORY OF INTERDIGITAL COUPLERS ON NONPIEZOELECTRIC SUBSTRATES
KINO, GS
WAGERS, RS
[J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (04) : 1480 - 1488
[6] STRUCTURES AND SAW PROPERTIES OF RF-SPUTTERED SINGLE-CRYSTAL FILMS OF ZNO ON SAPPHIRE
MITSUYU, T
ONO, S
WASA, K
[J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (05) : 2464 - 2470
[7] MITSUYU T, 1981, JPN J APPL PHYS S20, V20, P99
[8] Mitsuyu T., 1981, 1981 P IEEE ULTR S, P74
[9] ONO S, 1977, WAVE ELECTRON, V3, P35
[10] RF SPUTTERED EPITAXIAL ZNO FILMS ON SAPPHIRE FOR INTEGRATED-OPTICS
PARADIS, EL
SHUSKUS, AJ
[J]. THIN SOLID FILMS, 1976, 38 (02) : 131 - 141