STRUCTURES AND SAW PROPERTIES OF RF-SPUTTERED SINGLE-CRYSTAL FILMS OF ZNO ON SAPPHIRE

被引：187

作者：

MITSUYU, T

ONO, S

WASA, K

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 05期

关键词：

D O I：

10.1063/1.328019

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2464 / 2470

页数：7

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