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USE OF ISS AND DOUBLY CHARGED SECONDARY IONS TO MONITOR SURFACE-COMPOSITION DURING SIMS ANALYSES

被引：12
作者：
REED, DA
BAKER, JE
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 218卷 / 1-3期
关键词：
D O I：
10.1016/0167-5087(83)91000-1
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：324 / 326
页数：3
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