UV ABSORPTION-SPECTROSCOPY FOR MONITORING HYDRIDE VAPOR-PHASE EPITAXY OF INGAASP ALLOYS

被引：38

作者：

KARLICEK, RF

HAMMARLUND, B

GINOCCHIO, J

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 02期

关键词：

D O I：

10.1063/1.337431

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：794 / 799

页数：6

共 16 条

[1] MASS SPECTROMETRIC STUDIES OF VAPOR PHASE CRYSTAL GROWTH .1. GAASXP1-X SYSTEM (0 LESS THAN OR EQUAL TO X LESS THAN OR EQUAL TO 1) [J].

BAN, VS .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (09) :1473-&

[2] DEVELOPMENT OF LASER DIAGNOSTIC PROBES FOR CHEMICAL VAPOR-DEPOSITION OF INP/INGAASP EPITAXIAL LAYERS [J].

DONNELLY, VM ;

KARLICEK, RF .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (09) :6399-6407

[3] The absorption spectrum of arsenic [J].

Gibson, GE ;

MacFarlane, A .

PHYSICAL REVIEW, 1934, 46 (12) :1059-1068

[4]

HALMANN M, 1963, J CHEM SOC, V164, P2853

[5] 3P ORBITALS BENT BONDS AND ELECTRONIC SPECTRUM OF P4 MOLECULE [J].

HART, RR ;

ROBIN, MB ;

KUEBLER, NA .

JOURNAL OF CHEMICAL PHYSICS, 1965, 42 (10) :3631-&

[6] PH3 CONCENTRATION MEASUREMENTS BY VACUUM ULTRAVIOLET-ABSORPTION SPECTROSCOPY [J].

HONMA, N ;

SUGAYA, I ;

TAKAMI, K .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (04) :779-780

[7]

Huber KP, 1979, MOL SPECTRA MOL STRU, VIV, P38

[8]

HUBER KP, 1979, MOL SPECTRA MOL STRU, V4, P520

[9] REMOTE OPTICAL MONITORING OF REACTANTS IN A VAPOR-PHASE EPITAXIAL REACTOR [J].

KARLICEK, RF ;

BLOEMEKE, A .

JOURNAL OF CRYSTAL GROWTH, 1985, 73 (02) :364-368

[10] VAPOR-PHASE EQUILIBRIA IN SYSTEMS IN-INCL3 AND GA-GACL3 [J].

KUNIYA, Y ;

HOSAKA, M .

JOURNAL OF CRYSTAL GROWTH, 1975, 28 (03) :385-391

← 1 2 →