X-RAY PHOTOELECTRON-SPECTROSCOPY AND SURFACE-CHARGE BUILDUP USED TO STUDY RESIDUE ON ALUMINUM CONTACTS ON INTEGRATED-CIRCUITS

被引：19

作者：

THOMAS, JH

BRYSON, CE

PAMPALONE, TR

机构：

[1] KEVEX CORP,GLENN T SEABORG LAB,FOSTER CITY,CA 94404

[2] RCA CORP,CTR MICROELECTR,SOMERVILLE,NJ 08876

来源：

SURFACE AND INTERFACE ANALYSIS | 1989年 / 14卷 / 1-2期

关键词：

D O I：

10.1002/sia.740140110

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：39 / 45

页数：7

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