QUANTITATIVE-ANALYSIS OF THIN OXIDE LAYERS ON TANTALUM BY SPUTTERED NEUTRAL MASS-SPECTROMETRY (SNMS)

被引：20

作者：

OECHSNER, H ^{[1
]}

WUCHER, A ^{[1
]}

机构：

[1] SONDERFORSCH BEREICH 126, GOTTINGER, FED REP GER

来源：

APPLICATIONS OF SURFACE SCIENCE | 1982年 / 10卷 / 03期

关键词：

D O I：

10.1016/0378-5963(82)90165-9

中图分类号：

学科分类号：

摘要：

引用

页码：342 / 348

页数：7

共 11 条

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[J]. SURFACE SCIENCE, 1978, 76 (02) : 343 - 354
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