ADVANCED OSELO ISOLATION WITH SHALLOW GROOVES FOR HIGH-SPEED SUBMICROMETER ULSIS

被引：5

作者：

KAGA, T

KAWAMOTO, Y

IIJIMA, S

SUDOH, Y

SAKAI, Y

机构：

来源：

关键词：

D O I：

10.1109/16.3341

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：893 / 898

页数：6

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VANLIEROP, JG ;

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[5]

KUROSAWA K, 1981, J ELECTROCHEM SOC, P384

[6]

NOJIRI K, 1985, 17TH C SOL STAT DEV, P337

[7]

Shibata T., 1983, International Electron Devices Meeting 1983. Technical Digest, P27

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