COOPERATIVE DEVELOPMENT OF A PIEZORESISTIVE PRESSURE SENSOR WITH INTEGRATED SIGNAL CONDITIONING FOR AUTOMOTIVE AND INDUSTRIAL APPLICATIONS

被引：23

作者：

ANSERMET, S ^{[1
]}

OTTER, D ^{[1
]}

CRADDOCK, RW ^{[1
]}

DANCASTER, JL ^{[1
]}

机构：

[1] LUCAS AUTOMOT LTD,CTR ADV ENGN,SHIRLEY,ENGLAND

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 21卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(90)85016-W

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Considerable price reduction with respect to currently available sensors can be reached by industrial production of an integrated fully compensated sensor. A compatible process for simultaneous fabrication of sensors and IC was developed, starting from a standard 20 V bipolar process and from an original process for piezoresistive pressure sensors. A first approach of total integration of sensing element, amplifier and temperature compensation circuitry for an 8-bar differential pressure sensor in an automotive package was realised on a hybrid. The test included both electrical and environmental measurements. The results obtained with these devices show the feasability of integrating on the same chip the sensor and the output signal conditioning. © 1990.

引用

页码：79 / 83

页数：5