STUDY OF ELECTROCHEMICAL ETCH-STOP FOR HIGH-PRECISION THICKNESS CONTROL OF SILICON MEMBRANES

被引：126

作者：

KLOECK, B ^{[1
]}

COLLINS, SD ^{[1
]}

DEROOIJ, NF ^{[1
]}

SMITH, RL ^{[1
]}

机构：

[1] UNIV CALIF DAVIS,DEPT ELECT ENGN & COMP SCI,DAVIS,CA 95616

来源：

关键词：

D O I：

10.1109/16.22472

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：663 / 669

页数：7

共 17 条

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