共 12 条
[2]
COMPARISON OF INSTRUMENTS FOR MEASURING STEP HEIGHTS AND SURFACE PROFILES
[J].
APPLIED OPTICS,
1985, 24 (22)
:3766-3772
[3]
BENNETT JM, 1984, ASTM2A44 DOC
[5]
BERGKVIST M, 1986, IPAT WORKSHOP SEMICO
[6]
Born M, 1980, PRINCIPLES OPTICS
[7]
EASTMAN JM, 1978, PHYS THIN FILMS, V10, P167
[8]
RELATIONSHIP OF THE TOTAL INTEGRATED SCATTERING FROM MULTILAYER-COATED OPTICS TO ANGLE OF INCIDENCE, POLARIZATION, CORRELATION LENGTH, AND ROUGHNESS CROSS-CORRELATION PROPERTIES
[J].
APPLIED OPTICS,
1983, 22 (20)
:3207-3219