CRYSTALLIZATION AND DIFFUSION IN COMPOSITE TIO2-SIO2 THIN-FILMS

被引:67
作者
SANKUR, H
GUNNING, W
机构
关键词
D O I
10.1063/1.343784
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:4747 / 4751
页数:5
相关论文
共 15 条
[1]   A RAMAN-STUDY OF TIO2-SIO2 GLASSES PREPARED BY SOL-GEL PROCESSES [J].
BEST, MF ;
CONDRATE, RA .
JOURNAL OF MATERIALS SCIENCE LETTERS, 1985, 4 (08) :994-998
[2]  
Cullity B.D., ELEMENTS XRAY DIFFRA, V3rd
[3]  
DACHILLE F, 1968, AM MINERAL, V53, P1929
[4]  
DEVRIES RC, 1954, TRAS BRIT CERAM SOC, V53, P531
[5]   MICROSTRUCTURE OF DIELECTRIC THIN-FILMS FORMED BY E-BEAM CO-EVAPORATION [J].
FARABAUGH, EN ;
SANDERS, DM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :356-359
[6]   EXAMINATION OF THIN-FILMS IN THE ZRO2-SIO2 SYSTEM BY TRANSMISSION ELECTRON-MICROSCOPY AND X-RAY-DIFFRACTION TECHNIQUES [J].
FARABAUGH, EN ;
FELDMAN, A ;
SUN, J ;
SUN, YN .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :1671-1674
[7]  
GUNNING WJ, UNPUB
[8]  
Howitt D. G., 1987, Journal of Materials Research, V2, P201, DOI 10.1557/JMR.1987.0201
[9]   THERMALLY INDUCED CRYSTALLIZATION OF AMORPHOUS-TITANIA FILMS [J].
HSU, LS ;
RUJKORAKARN, R ;
SITES, JR ;
SHE, CY .
JOURNAL OF APPLIED PHYSICS, 1986, 59 (10) :3475-3480
[10]  
MILLER KM, UNPUB