BEAMSPLITTER CUBE FOR WHITE-LIGHT INTERFEROMETRY

被引:16
作者
FARR, KB [1 ]
GEORGE, N [1 ]
机构
[1] UNIV ROCHESTER,COLL ENGN & APPL SCI,ROCHESTER,NY 14627
关键词
BEAMSPLITTER CUBE; TUNABLE DYE LASER; WHITE LIGHT INTERFEROMETRY; PATH-LENGTH DIFFERENCE MEASUREMENT;
D O I
10.1117/12.59886
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Beamsplitter cubes are widely used in white light interferometers to ensure that each interferometer path is balanced with equal amounts of glass. However, commercially available beamsplitter cubes can have alignment errors and size deviations that introduce path differences into the interferometer. A technique for constructing a beamsplitter cube that has extremely well balanced paths is described. Using a tunable dye laser with rhodimine 6G, we have readily measured path differences less than 0.5 mum. By monitoring the beamsplitter path difference with the dye laser, we can adjust the path difference during assembly, thereby sliding the prisms into proper alignment on a layer of UV-cured cement.
引用
收藏
页码:2191 / 2196
页数:6
相关论文
共 14 条
[1]  
BOR Z, 1985, APPL OPTICS, V24, P3340
[2]   CONTOURING ASPHERIC SURFACES USING 2-WAVELENGTH PHASE-SHIFTING INTERFEROMETRY [J].
CREATH, K ;
CHENG, YY ;
WYANT, JC .
OPTICA ACTA, 1985, 32 (12) :1455-1464
[3]   COSINUSOIDAL TRANSFORMS IN WHITE-LIGHT [J].
GEORGE, N ;
WANG, SG .
APPLIED OPTICS, 1984, 23 (06) :787-797
[4]  
Hariharan P., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V816, P2, DOI 10.1117/12.941752
[5]   WHITE-LIGHT AC INTERFEROMETRY FOR MULTIPLE LASER PATH LENGTH EQUALIZATION [J].
HOOSE, JF .
OPTICAL ENGINEERING, 1980, 19 (06) :825-827
[6]   INTERFEROMETRIC MEASUREMENT OF GROUP AND PHASE REFRACTIVE-INDEX [J].
HOPLER, MD ;
ROGERS, JR .
APPLIED OPTICS, 1991, 30 (07) :735-744
[7]   PHASE-LOCKED INTERFEROMETRY [J].
JOHNSON, GW ;
LEINER, DC ;
MOORE, DT .
OPTICAL ENGINEERING, 1979, 18 (01) :46-52
[8]  
Petermann K., 1988, LASER DIODE MODULATI
[9]   SINUSOIDAL PHASE MODULATING INTERFEROMETRY FOR SURFACE PROFILE MEASUREMENT [J].
SASAKI, O ;
OKAZAKI, H .
APPLIED OPTICS, 1986, 25 (18) :3137-3140
[10]   PHASE LOCKED LASER DIODE INTERFEROMETRY FOR SURFACE PROFILE MEASUREMENT [J].
SUZUKI, T ;
SASAKI, O ;
MARUYAMA, T .
APPLIED OPTICS, 1989, 28 (20) :4407-4410