PHASE LOCKED LASER DIODE INTERFEROMETRY FOR SURFACE PROFILE MEASUREMENT

被引：57

作者：

SUZUKI, T

SASAKI, O

MARUYAMA, T

机构：

来源：

APPLIED OPTICS | 1989年 / 28卷 / 20期

关键词：

D O I：

10.1364/AO.28.004407

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：4407 / 4410

页数：4

共 8 条

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[7] DIODE-LASER DIRECT MODULATION HETERODYNE INTERFEROMETER [J].

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APPLIED OPTICS, 1987, 26 (01) :37-40

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