EFFICIENT IMPLEMENTATION OF RIGOROUS COUPLED-WAVE ANALYSIS FOR SURFACE-RELIEF GRATINGS

被引：149

作者：

PENG, S

MORRIS, GM

机构：

[1] The Institute of Optics, University of Rochester, Rochester, NY

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1995年 / 12卷 / 05期

关键词：

D O I：

10.1364/JOSAA.12.001087

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A computationally efficient implementation of rigorous coupled-wave analysis is presented. The eigenvalue problem for a one-dimensional grating in a conical mounting is reduced to two eigenvalue problems in the corresponding nonconical mounting. This reduction yields two n x n matrices to solve for eigenvalues and eigenvectors, where n is the number of orders retained in the computation. For a two-dimensional grating, the size of the matrix in the eigenvalue problem is reduced to 2n x 2n. These simplifications reduce the computation time for the eigenvalue problem by 8-32 times compared with the original computation time. In addition, we show that with rigorous coupled-wave analysis one analytically satisfies reciprocity by retaining the appropriate choice of spatial harmonics in the analysis. Numerical examples are given for metallic lamellar gratings, pulse-width-modulated gratings, deep continuous surface-relief gratings, and two-dimensional gratings.

引用

页码：1087 / 1096

页数：10

共 26 条

[1] Petit R., Electromagnetic Theory of Gratings, (1980)
[2] Gaylord T.K., Moharam M.G., Analysis and applications of optical diffraction by gratings, Proc. IEEE, 73, pp. 894-937, (1985)
[3] Botten L.C., Craig M.S., McPhedran R.C., Adams J.L., Andrewartha J.R., The dielectric lamellar diffraction grating, Opt. Acta, 28, pp. 413-428, (1981)
[4] Knop K., Rigorous diffraction theory for transmission phase gratings with deep rectangular grooves, J. Opt. Soc. Am., 68, pp. 1206-1210, (1978)
[5] Moharam M.G., Gaylord T.K., Rigorous coupled-wave analysis of planar-grating diffraction, J. Opt. Soc. Am., 71, pp. 811-818, (1981)
[6] Moharam M.G., Gaylord T.K., Rigorous coupled-wave analysis of grating diffraction—E-mode polarization and losses, J. Opt. Soc. Am., 73, pp. 451-455, (1983)
[7] Moharam M.G., Gaylord T.K., Three-dimensional vector coupled-wave analysis of planar-grating diffraction, J. Opt. Soc. Am., 73, pp. 1105-1112, (1983)
[8] Moharam M.G., Gaylord T.K., Diffraction analysis of dielectric surface-relief gratings, J. Opt. Soc. Am., 72, pp. 1385-1392, (1982)
[9] Moharam M.G., Gaylord T.K., Rigorous coupled-wave analysis of metallic surface-relief gratings, J. Opt. Soc. Am. A, 3, pp. 1780-1787, (1986)
[10] Moharam M.G., Coupled-wave analysis of two-dimensional gratings, Holographic Optics: Design and Applications, 883, pp. 8-11, (1988)

← 1 2 3 →