EFFICIENT IMPLEMENTATION OF RIGOROUS COUPLED-WAVE ANALYSIS FOR SURFACE-RELIEF GRATINGS

被引：150

作者：

PENG, S

MORRIS, GM

机构：

[1] The Institute of Optics, University of Rochester, Rochester, NY

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1995年 / 12卷 / 05期

关键词：

D O I：

10.1364/JOSAA.12.001087

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A computationally efficient implementation of rigorous coupled-wave analysis is presented. The eigenvalue problem for a one-dimensional grating in a conical mounting is reduced to two eigenvalue problems in the corresponding nonconical mounting. This reduction yields two n x n matrices to solve for eigenvalues and eigenvectors, where n is the number of orders retained in the computation. For a two-dimensional grating, the size of the matrix in the eigenvalue problem is reduced to 2n x 2n. These simplifications reduce the computation time for the eigenvalue problem by 8-32 times compared with the original computation time. In addition, we show that with rigorous coupled-wave analysis one analytically satisfies reciprocity by retaining the appropriate choice of spatial harmonics in the analysis. Numerical examples are given for metallic lamellar gratings, pulse-width-modulated gratings, deep continuous surface-relief gratings, and two-dimensional gratings.

引用

页码：1087 / 1096

页数：10

共 26 条

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