DEPTH RESOLUTION OF LOW-DEFLECTION AND HIGH-DEFLECTION BACKSCATTERED ELECTRON IMAGES IN SCANNING ELECTRON-MICROSCOPE

被引：16

作者：

MURATA, K ^{[1
]}

机构：

[1] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA,JAPAN

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1976年 / 36卷 / 02期

关键词：

D O I：

10.1002/pssa.2210360213

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：527 / 532

页数：6

共 8 条

COSSLETT, VE ;

THOMAS, RN .

BRITISH JOURNAL OF APPLIED PHYSICS, 1965, 16 (06) :779-&

[2]

MURATA K, 1976, PHYS STATUS SOLIDI A, V36, P197, DOI 10.1002/pssa.2210360121

MURATA, K ;

MATSUKAWA, T ;

SHIMIZU, R .

[4]

MURATA K, 1973, SCANNING ELECTRON MI, P268

[5] NEW CONTRAST MECHANISM FOR SCANNING ELECTRON MICROSCOPE [J].

WELLS, OC .

[6] LOW-LOSS IMAGE FOR SURFACE SCANNING ELECTRON MICROSCOPE [J].

WELLS, OC .

[7]

WELLS OC, 1972, SCANNING ELECTRON MI, P170

[8]

WELLS OC, 1972, 6TH P INT C XRAY OPT, P463