STRUCTURAL CONSEQUENCES OF ION ASSISTED DEPOSITION

[1] BERGER R, 1983, P SOC PHOTO-OPT INST, V401, P69, DOI 10.1117/12.935504

[2] SYNTHESIS AND CHARACTERIZATION OF YTTRIUM-OXIDE (Y2O3) DEPOSITS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 536 - 539

[3] HOFFMAN RW, 1971, AEC76 CAS W RES U TE

[4] HOFFMAN RW, 1961, AEC18 CAS W RES U TE

[5] HOFFMAN RW, 1975, AEC82 CAS W RES U TE

[6] HOFFMAN RW, 1972, AEC79 CAS W RES U TE

[7] HOFFMAN RW, 1975, AEC83 CAS W RES U TE

[8] HOFFMAN RW, 1970, AEC64 CAS W RES U TE

[9] MORPHOLOGY OF ION-PLATED TITANIUM AND ALUMINUM FILMS DEPOSITED AT VARIOUS SUBSTRATE TEMPERATURES [J]. THIN SOLID FILMS, 1978, 54 (03) : 317 - 322

[10] ION-ASSISTED DEPOSITION OF OPTICAL THIN-FILMS - LOW-ENERGY VS HIGH-ENERGY BOMBARDMENT [J]. APPLIED OPTICS, 1984, 23 (04): : 552 - 559

[1] BERGER R, 1983, P SOC PHOTO-OPT INST, V401, P69, DOI 10.1117/12.935504

[2] SYNTHESIS AND CHARACTERIZATION OF YTTRIUM-OXIDE (Y2O3) DEPOSITS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 536 - 539

[3] HOFFMAN RW, 1971, AEC76 CAS W RES U TE

[4] HOFFMAN RW, 1961, AEC18 CAS W RES U TE

[5] HOFFMAN RW, 1975, AEC82 CAS W RES U TE

[6] HOFFMAN RW, 1972, AEC79 CAS W RES U TE

[7] HOFFMAN RW, 1975, AEC83 CAS W RES U TE

[8] HOFFMAN RW, 1970, AEC64 CAS W RES U TE

[9] MORPHOLOGY OF ION-PLATED TITANIUM AND ALUMINUM FILMS DEPOSITED AT VARIOUS SUBSTRATE TEMPERATURES [J]. THIN SOLID FILMS, 1978, 54 (03) : 317 - 322

[10] ION-ASSISTED DEPOSITION OF OPTICAL THIN-FILMS - LOW-ENERGY VS HIGH-ENERGY BOMBARDMENT [J]. APPLIED OPTICS, 1984, 23 (04): : 552 - 559