SYNTHESIS AND CHARACTERIZATION OF YTTRIUM-OXIDE (Y2O3) DEPOSITS

[1] AUWARTER M, 1960, Patent No. 2920002

[2] Brinsmaid D., 1957, U.S. patent, Patent No. [2,784,115, 2784115]

[3] Bunshah R.F, 1974, U.S. Patent, Patent No. [3,791,852, 3791852]

[4] ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06): : 1385 - &

[5] BUNSHAH RF, 1974, 4 P INT C VAC MET, P17

[6] ON THEORY OF HERTZIAN FRACTURE [J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1967, 299 (1458) : 291 - +

[7] DIRECT MEASUREMENTS OF THE SURFACE ENERGIES OF CRYSTALS [J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (12) : 2208 - 2218

[8] SYNTHESIS OF VARIOUS OXIDES IN TI-O SYSTEM BY REACTIVE EVAPORATION AND ACTIVATED REACTIVE EVAPORATION TECHNIQUES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 593 - 597

[9] Holland L., 1966, VACUUM DEPOSITION TH

[10] LYNCH JF, 1966, ENGINEERING PROPERTI

[1] AUWARTER M, 1960, Patent No. 2920002

[2] Brinsmaid D., 1957, U.S. patent, Patent No. [2,784,115, 2784115]

[3] Bunshah R.F, 1974, U.S. Patent, Patent No. [3,791,852, 3791852]

[4] ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06): : 1385 - &

[5] BUNSHAH RF, 1974, 4 P INT C VAC MET, P17

[6] ON THEORY OF HERTZIAN FRACTURE [J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1967, 299 (1458) : 291 - +

[7] DIRECT MEASUREMENTS OF THE SURFACE ENERGIES OF CRYSTALS [J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (12) : 2208 - 2218

[8] SYNTHESIS OF VARIOUS OXIDES IN TI-O SYSTEM BY REACTIVE EVAPORATION AND ACTIVATED REACTIVE EVAPORATION TECHNIQUES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 593 - 597

[9] Holland L., 1966, VACUUM DEPOSITION TH

[10] LYNCH JF, 1966, ENGINEERING PROPERTI