SYNTHESIS OF VARIOUS OXIDES IN TI-O SYSTEM BY REACTIVE EVAPORATION AND ACTIVATED REACTIVE EVAPORATION TECHNIQUES

被引：24

作者：

GROSSKLAUS, W ^{[1
]}

BUNSHAH, RF ^{[1
]}

机构：

[1] UNIV CALIF,SCH ENGN,MAT DEPT,LOS ANGELES,CA 90024

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.568618

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：593 / 597

页数：5

共 26 条

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[2] IDENTIFICATION OF TITANIUM OXIDES BY X-RAY POWDER PATTERNS
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[J]. ACTA CHEMICA SCANDINAVICA, 1957, 11 (10): : 1653 - 1657
[3] PHASE ANALYSIS STUDIES ON THE TITANIUM-OXYGEN SYSTEM
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MAGNELI, A
[J]. ACTA CHEMICA SCANDINAVICA, 1957, 11 (10): : 1641 - 1652
[4] AUWARTER M, 1960, Patent No. 2920002
[5] BEALE HA, PRIVATE COMMUNICATIO
[6] BEALE HA, 1974, 4 P INT C VAC MET IR, P238
[7] Blocher JM., 1967, HIGH TEMPERATURE MAT, P379
[8] Bunshah R.F, 1974, U.S. Patent, Patent No. [3,791,852, 3791852]
[9] ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06): : 1385 - &
[10] BUNSHAH RF, 1974, 4 P INT C VAC MET, P17