SYNTHESIS AND CHARACTERIZATION OF YTTRIUM-OXIDE (Y2O3) DEPOSITS

被引：10

作者：

COLEN, M ^{[1
]}

BUNSHAH, RF ^{[1
]}

机构：

[1] UNIV CALIF, SCH ENGN & APPL SCI, MAT DEPT, LOS ANGELES, CA 90024 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期

关键词：

D O I：

10.1116/1.568921

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：536 / 539

页数：4

共 17 条

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[14] EFFECT OF SUBSTRATE TEMPERATURE ON STRUCTURE OF TITANIUM CARBIDE DEPOSITED BY ACTIVATED REACTIVE EVAPORATION
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BUNSHAH, RF
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06): : 1389 - &
[15] STRUCTURE AND MICROHARDNESS RELATIONSHIPS IN TI, ZR AND HF-3ZR CARBIDE DEPOSITS SYNTHESIZED BY ACTIVATED REACTIVE EVAPORATION
RAGHURAM, AC
NIMMAGADDA, R
BUNSHAH, RF
WAGNER, CNJ
[J]. THIN SOLID FILMS, 1974, 20 (01) : 187 - 199
[16] INFLUENCE OF APPARATUS GEOMETRY AND DEPOSITION CONDITIONS ON STRUCTURE AND TOPOGRAPHY OF THICK SPUTTERED COATINGS
THORNTON, JA
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04): : 666 - 670
[17] WESTWOOD ARC, 1960, J APPL PHYS, V34, P3085