HYBRID-ALIGNED NEMATIC LIQUID-CRYSTAL MODULATORS FABRICATED ON VLSI CIRCUITS

被引：12

作者：

DROLET, JJP ^{[1
]}

PATEL, JS ^{[1
]}

HARITOS, KG ^{[1
]}

XU, WH ^{[1
]}

SCHERER, A ^{[1
]}

PSALTIS, D ^{[1
]}

机构：

[1] BELL COMMUN RES INC,NAVESINK RES & ENGN CTR,RED BANK,NJ 07701

来源：

OPTICS LETTERS | 1995年 / 20卷 / 21期

关键词：

D O I：

10.1364/OL.20.002222

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new method for fabricating analog Light modulators on VLSI devices is described. The process is fully compatible with devices fabricated by commercial VLSI foundries, and the assembly of the modulator structures requires a small number of simple processing steps. The modulators are capable of analog amplitude or phase modulation and can operate at video rates and at low voltages (2.2 V). The modulation mechanism and the process yielding the modulator structures are described. Experimental data are presented. (C) 1995 Optical Society of America

引用

页码：2222 / 2224

页数：3

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