IMPROVING THE PERFORMANCE OF LIQUID-CRYSTAL-OVER-SILICON SPATIAL LIGHT MODULATORS - ISSUES AND ACHIEVEMENTS

被引：18

作者：

UNDERWOOD, I ^{[1
]}

VASS, DG ^{[1
]}

OHARA, A ^{[1
]}

BURNS, DC ^{[1
]}

MCOWAN, PW ^{[1
]}

GOURLAY, J ^{[1
]}

机构：

[1] UNIV EDINBURGH, DEPT PHYS, EDINBURGH EH9 3JL, MIDLOTHIAN, SCOTLAND

来源：

APPLIED OPTICS | 1994年 / 33卷 / 14期

关键词：

SPATIAL LIGHT MODULATORS; OPTICAL QUALITY; FERROELECTRIC LIQUID CRYSTAL; MIRROR MORPHOLOGY; GRAY SCALE; PLANARIZATION;

D O I：

10.1364/AO.33.002768

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The performance of liquid-crystal-over-silicon spatial light modulators has advanced rapidly in recent years. Most progress has centered around new device designs with increased bandwidth. In this paper we report on a number of techniques to improve the optical quality; these have applications in both current and future devices.

引用

页码：2768 / 2774

页数：7

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