MATERIALS CONSIDERATIONS FOR ADVANCES IN SUB-MICRON VERY LARGE-SCALE INTEGRATION

被引:9
作者
FERRY, DK
机构
来源
ADVANCES IN ELECTRONICS AND ELECTRON PHYSICS | 1982年 / 58卷
关键词
D O I
10.1016/S0065-2539(08)61026-4
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:311 / 390
页数:80
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