CHEMICAL SPUTTERING OF CARBON BY SUB-EV ATOMIC-HYDROGEN - NEW RESULTS AND A CRITICAL COMPARISON WITH PREVIOUS DATA RELEVANT TO FUSION APPLICATIONS

被引：28

作者：

STANGEBY, PC

AUCIELLO, O

HAASZ, AA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 03期

关键词：

D O I：

10.1116/1.572034

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

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页码：1425 / 1429

页数：5

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