CONDITIONING OF ION SOURCES FOR MASS-SPECTROMETRY OF PLASMAS

被引：29

作者：

DYLLA, HF ^{[1
]}

BLANCHARD, WR ^{[1
]}

机构：

[1] MAX PLANCK INST PLASMA PHYS,EURATOM ASSOC,D-8046 GARCHING,FED REP GER

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.572093

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1297 / 1301

页数：5

共 27 条

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[10]

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