VELOCITY-DISTRIBUTION FUNCTIONS OF SPUTTERED ATOMS CAUSED BY INSUFFICIENTLY DEVELOPED COLLISION-CASCADES

被引：6

作者：

MATSUDA, Y

YAMAMURA, Y

HONDA, C

MATSUBAGUCHI, S

MAEDA, M

MURAOKA, K

AKAZAKI, M

机构：

[1] KYUSHU UNIV, FAC ENGN, DEPT ELECT ENGN, FUKUOKA 812, JAPAN

[2] OKAYAMA UNIV SCI, DEPT APPL PHYS, OKAYAMA 700, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1986年 / 25卷 / 08期

关键词：

D O I：

10.1143/JJAP.25.1256

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1256 / 1257

页数：2

共 11 条

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