MICROSTRUCTURE AND OPTICAL-PROPERTIES OF FREESTANDING POROUS SILICON FILMS - SIZE DEPENDENCE OF ABSORPTION-SPECTRA IN SI NANOMETER-SIZED CRYSTALLITES

被引：447

作者：

KANEMITSU, Y ^{[1
]}

UTO, H ^{[1
]}

MASUMOTO, Y ^{[1
]}

MATSUMOTO, T ^{[1
]}

FUTAGI, T ^{[1
]}

MIMURA, H ^{[1
]}

机构：

[1] NIPPON STEEL CORP LTD, ELECTR RES LABS, SAGAMIHARA, KANAGAWA 229, JAPAN

来源：

PHYSICAL REVIEW B | 1993年 / 48卷 / 04期

关键词：

D O I：

10.1103/PhysRevB.48.2827

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have studied the microstructure and optical properties of free-standing porous Si thin films fabricated by electrochemical anodization. Raman-spectroscopy and transmission-electron-microscopy examinations show that Si crystallite spheres with diameters of several nanometers are dispersed in the amorphous phase. The blueshift of the optical-absorption spectrum is observed for decreasing average diameter of the Si crystallites. However, there is no clear size dependence of the peak energy of the broad photoluminescence (PL) spectrum. Spectroscopic analysis strongly suggests that the photogeneration of carriers occurs in the c-Si core, whose band gap is modified by the quantum-confinement effect, while the strong PL comes from the near-surface region of small crystallites.

引用

页码：2827 / 2830

页数：4

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